Journal Paper

Paper Title - Raman Analysis of Amorphous Carbon Coatings Prepared By Hollow Cathodes At Moderate Pressure


Abstract
Amorphous carbon coatings have been prepared using cylindrical and linear hollow cathode arrangements. The deposition has been carried out in a hybrid PVD/PE-CVD mode using graphite cathodes and C2H2 reactive gas and Ar as the carrier gas. Microstructure of the deposited coatings have been studied using Raman spectroscopy. The results show that amorphous carbon films with sp3 fraction of less than 20% can be deposited. In the M-M linear hollow cathode system increased C2H2 contents contribute to higher graphitic disorder. Higher deposition pressure promotes deposition of more hydrogenated coatings at lower acetylene contents. Index Terms- Amorphous carbon, hollow cathode, hybrid PVD/PE-CVD, Raman analysis


Author - Kaspars Silins, Hana Barankova, Ladislav Bardos

Citation - Kaspars Silins   ,   Hana Barankova   ,   Ladislav Bardos   ,   Kaspars Silins, Hana Barankova, Ladislav Bardos " Raman Analysis of Amorphous Carbon Coatings Prepared By Hollow Cathodes At Moderate Pressure " , International Journal of Industrial Electronics and Electrical Engineering , Volume-5,Issue-8  ( Aug, 2017 )

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| Published on 2017-10-18