International Journal of Industrial Electronics and Electrical Engineering(IJIEEE).
Paper Title - Experimental Studies of Shape Measurement Thin Film by Interferometry Techniques
The paper predominantly accentuates on the experimental studies of shape measurement for thin film by
Interferometry Techniques. The research challenge in this study is technical hitches on shape of surface measurement of
Indium Tin Oxide (ITO) thin film using conventional technologies. The way out of this research challenge is to measure the
shape of the thin film based on sinusoidal phase modulation with interference signal, error value and shape value in
nanometer range. The impartial of this research is to accomplish enhanced enactment of the thin film shape measurement in
the range of nanometer skill. The experimental results in this study confirm that the measurement technique of thin film in
this study was encountered the high performance applications in actuality. The investigations were conceded out with the
experimental methodologies by complimentary the numerical approaches in the laboratory.
Keywords: Shape Measurement, Thin Film, Sinusoidal Phase Modulating Interferometry, Optical Signal Processing,
Author - Nway Nway Hlaing, Khaing Zin Thet, Atar Mon, Thiri Thandar Aung, Tin Thet New, Win Kay Khaing, Hla Myo Tun