Fabrication of the Flexible Indium Tin Oxide Films
In this study, radio frequency magnetron sputtering was used to deposit indium tin oxide (ITO) thin films with
varying deposition power on flexible polyimide (PI) substrates. The structural, optical, and resistivity properties of the ITO
thin films were investigated with field emission scanning electron microscope, X-ray diffraction patterns, UV-visible
spectroscopy, and Hall-effect analysis. As the deposition time of the ITO thin films increased from 40 W to 120 W, the
average transparency and resistivity of the ITO thin films were decreased.
Keywords - Indium tin oxide; flexible; transmittance; RF magnetron sputtering; resistivity.