Electrostatic and Thermal Actuated Nano Tweezers
The aim of this study is to discuss the new technology in the field of Nano Tweezers. These tweezers integrate
the electrostatic and thermal actuation. In this new technology, the Nanotweezers will have the ability work in the field of
biotechnology for instance in the manipulation of DNA molecules or force sensing. The project will involve the design and
the fabrication part. The new design will feature two tungsten tips that are chemically etched and attached to a carbon fiberreinforced
polymers. It will have electrostatic and thermal actuators. The fabrication part will combine the tungsten etching
and the ion deep reactive etching on an insulator made of the silicon wafer to form Nanotips that are sharp and
microstructures that are of high aspect ratio respectively.
Keywords— Nanotweezers, Nanotubes, Silicon-on-Insulator, Electrical and Thermal Actuators.